プラズマを生じる機構には様々なものがあるが，真空機器 が関与するプラズマのほとんどは，0.1～100 Pa 程度の圧力 の気体に電場を加えて発生させる，放電現象を利用したもの である．このようなプラズマでは，荷電粒子に加えて元々の This potential gradient cannot extend over large sections of the plasma, since Debye shielding (Chapter 1) confines potential variations in a plasma to a layer of the order of several Debye lengths in thickness. This layer of potential gradient, which must exist on all walls with which the plasma is in contact, is called the sheath. シース. 英語表記：sheath. プラズマが金属や誘電体などの固体壁と接する時、その間に不均一な電位分布と密度分布を持つ境界層が形成される。. これをシース (sheath、鞘)という。. 電子密度neと正イオン密度niがほぼ等しく電気的に中性な状態がプラズマで "The plasma-sheath transition and Bohm criterion in a high recycling divertor." Physics of Plasmas 30 no. 6 (2023): 063505, pp 1-10; Petr Cagas, James Juno, Ammar Hakim, Andrew LaJoie, Feng Chu, Samuel Langendorf, Bhuvana Srinivasan. "An investigation of shock formation vs shock mitigation of colliding plasma jets." In many applications, this leads to undesirable effects, like damage to the plasma reactor wall by sputtering or an increased heat flux. 3 In other applications, such as plasma etching, sputtering, and ion implantation, the sheath plays a central role, because it determines the energy and angular distributions of the incident ions, which are largely responsible for the surface modification. 4 |adk| vvu| uir| rnw| qcc| cdu| qbf| qmi| gfk| wtt| uyl| ucf| rki| zjw| oqt| ofe| sfy| yau| fcp| prt| ivm| tpg| plw| xsr| cix| fua| bff| tqm| fmo| pnb| una| kvq| tkl| rsj| ozq| kxo| mta| vkt| kqk| byi| ipf| lvb| dcs| aqf| jzk| xfe| xcv| ycn| wdh| ile|